By Norman G. Einspruch,Simon S. Cohen,Gennady Sh. Gildenblat
ISBN-10: 0122341155
ISBN-13: 9780122341151
This quantity is constructed from 10 chapters. the 2 introductory chapters, bankruptcy 1 and a couple of function common references for and metallurgical houses of skinny accomplishing motion pictures. next chapters overview a number of the facets of VLSI metallization. The order of presentation has been selected to persist with the typical processing series. In bankruptcy three, a few suitable steel deposition strategies are mentioned. bankruptcy four provides the tools of VLSI lithography and etching. carrying out motion pictures are first deposited on the gate definition step; for that reason, the problems concerning gate metallization are mentioned subsequent in bankruptcy 5.In bankruptcy 6, touch metallization is elaborated, and bankruptcy 7 is dedicated to multilevel metallization schemes. Long-time reliability is the topic of bankruptcy eight, which discusses the problems of touch and interconnect electromigration. GaAs metallization is tackled in bankruptcy nine. the amount concludes with a basic dialogue of the capabilities of interconnect platforms in VLSI.
Materials scientists, processing and layout engineers, and machine physicists will locate the e-book very useful.
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VLSI Metallization: 15 (VLSI Electronics Microstructure Science) by Norman G. Einspruch,Simon S. Cohen,Gennady Sh. Gildenblat
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